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High Current Ion Implantation System
Medium Current Ion Implantation System
High Energy Ion Implantation System
Ion Implantation System for FPD
As the leading manufacturer of ion implantation systems for semiconductor industry in Japan, SEN provides high-current, medium-current, and high-energy ion implantation systems for the production of the latest semiconductor devices, including those for 300 mm wafers.

We also provide ion implantation systems most suitable for the production of low-temperature polysilicon TFT-LCDs and organic EL displays, whose high performance is attracting attention for use in the production of high performance flat panel displays.




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