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High Current Ion Implantation System
Sumitomo Heavy Industries Ion Technology is the leading manufacturer of high current ion implantation systems in Japan.


Single Wafer Type
SHX-III/S SHX-II SHX





Batch Type
LEX3-II LEX-II
LEX3 LEX
NV-GSDIII-LE NV-GSD-HC3
NV-GSDIII-180 HC3-180


Sumitomo Heavy Industries Ion Technology Co., Ltd.
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