Nov. 1, 2011   Our latest versions of SHX series, MC3-II series, HE series and UHE ion implanters are featured at SEMICON JAPAN 2011.  Aug. 11, 2011   Our latest versions of SHX series, MC3-II series and High Energy ion implanters are featured at SEMICON Taiwan 2011. (@ Taipei World Trade Center)  Oct. 1, 2010   SEN established SEN (TAIWAN) CORPORATION in Hsinchu, and opened for business.  Jun. 1, 2010   SEN set up the Korea office in Hwaseong-City.  Apr. 1, 2009   SEN Corporation, an SHI and Axcelis Company changed its name to SEN Corporation, effective April 1, 2009.  Oct. 20, 2008   Our latest versions of SHX and MC3-II series ion implanters are featured at Semicon Japan 2008.  Nov. 1, 2007   SEN features recent developments in SHX and MC3 series ion implanters at Semicon Japan 2007.  Nov. 1, 2006   SEN features SHX and MC3 series at Semicon Japan 2006.  Spt. 1, 2006   Our Kyushu Service Center will be moved and be in service at the new office from September 18, 2006.  Mar. 1, 2006   Sumitomo Eaton Nova Corporation change its name to SEN Corporation, an SHI and Axcelis Company, effective April 1, 2006.  Jan. 23, 2006   SEN wins the 2005 VLSI Five Stars Overall Supplier Rating in Customer Satisfaction Survey.  Nov. 1, 2005   SEN presents SHX at Semicon Japan 2005.  Oct. 1, 2005   Sumitomo Eaton Nova presents ORion II series, ion implanter for FPD, at FPD International 2005.  Jul. 11, 2005   Sumitomo Eaton Nova has started the shipment of New Generation Single Wafer Ion Implantation System  Nov. 12, 2004   Sumitomo Eaton Nova presents LEX3-II, LEX-II and MC3-II, featuring much-improved productivity, at SEMICON Japan 2004, to be held at Makuhari Messe, Chiba, Japan on December 1-3, 2004.  Oct. 1, 2004   Sumitomo Eaton Nova presents new ORion II series, ion implanters for FPD, at FPD International 2004.  Jul. 1, 2004   Sumitomo Eaton Nova introduces New ORion II series, ion implornters for FPD, at the 14th Flat Panel Display Manufacturing Technology Expo.